Polymers in microlithography :
Polymers in microlithography : Materiales an process /
Ed. Elsa reichmains, Scott a. MacDonald, takoa iwayanagi
- 449 páginas
- ACS symposium series ; 412 .
"developed from a symposium sponsored by te division of polymeric materials : science and engineering at the 197th national meeting of the american chemical society, dallas, texas, april 9-14, 1989"
0841217077
Polímeros--Congresos
Fotoprotección--Congresos
Microlitografia--Materiales--Congresos
TK7871.15 / P65
"developed from a symposium sponsored by te division of polymeric materials : science and engineering at the 197th national meeting of the american chemical society, dallas, texas, april 9-14, 1989"
0841217077
Polímeros--Congresos
Fotoprotección--Congresos
Microlitografia--Materiales--Congresos
TK7871.15 / P65