Universidad Nacional Autónoma de México
Facultad de Química
Catálogo de la Biblioteca de Estudios de Posgrado

Polymers in microlithography : Materiales an process / Ed. Elsa reichmains, Scott a. MacDonald, takoa iwayanagi

Contributor(s): Reichmanis, Elsa [editor] | Macdonald Scott A [editor] | Iwayanagi, Takao, 1949- [editor] | American Chemical SocietyMaterial type: TextTextSeries: ACS symposium series ; 412Publisher: Washington : American chemical association, 1989Description: 449 páginasContent type: texto Media type: sin medio Carrier type: volumenISBN: 0841217077Subject(s): Polímeros -- Congresos | Fotoprotección -- Congresos | Microlitografia -- Materiales -- CongresosLOC classification: TK7871.15 | P65
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Item type Current library Collection Call number Copy number Status Date due Barcode Item holds
Libros Libros División de Estudios de Posgrado. Libros
Libros 		General TK7871.15 P65 (Browse shelf(Opens below)) 1 Available 5135
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"developed from a symposium sponsored by te division of polymeric materials : science and engineering at the 197th national meeting of the american chemical society, dallas, texas, april 9-14, 1989"

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