TY  - BOOK
AU  - Wilson, Syd R.
AU  - Powell, Ronald A.
AU  - Davies, D. Eirug.
TI  - Rapid thermal processing of electronic materials: Symposium held april 21-23, 1987, anaheim california, u.s.a. 
T2  - Materials Research Society symposia proceedings
SN  - 0931837596
AV  - TK7871.85 R365 1987
PY  - 1987///
CY  - Pittsburgh, pennsylvania
PB  - Materials research society
KW  - Semiconductores
KW  - Tratamiento termico
KW  - Congresos
KW  - Semiconductores impuros
ER  -