Polymers in microlithography : Materiales an process / Ed. Elsa reichmains, Scott a. MacDonald, takoa iwayanagi
Material type: TextSeries: ACS symposium series ; 412Publisher: Washington : American chemical association, 1989Description: 449 páginasContent type: texto Media type: sin medio Carrier type: volumenISBN: 0841217077Subject(s): Polímeros -- Congresos | Fotoprotección -- Congresos | Microlitografia -- Materiales -- CongresosLOC classification: TK7871.15 | P65Item type | Current library | Collection | Call number | Copy number | Status | Date due | Barcode | Item holds |
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Libros | División de Estudios de Posgrado. Libros Libros | General | TK7871.15 P65 (Browse shelf(Opens below)) | 1 | Available | 5135 |
Total holds: 0
"developed from a symposium sponsored by te division of polymeric materials : science and engineering at the 197th national meeting of the american chemical society, dallas, texas, april 9-14, 1989"
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