| 000 | 00989nam a2200253zi 4500 | ||
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| 005 | 20200318115045.0 | ||
| 008 | 040830c1987ng0 12 | ||
| 020 | _a0931837596 | ||
| 035 | _aMX001000605336 | ||
| 050 |
_aTK7871.85 _bR365 1987 |
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| 245 | 0 | 0 |
_aRapid thermal processing of electronic materials : _bSymposium held april 21-23, 1987, anaheim california, u.s.a. / _cEds. syd r. Wilson, Ronald powell, d. eirug Davies |
| 264 | 1 |
_aPittsburgh, pennsylvania : _bMaterials research society, _cc1987 |
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| 300 | _axvii, 485 páginas | ||
| 490 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 92 |
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| 650 |
_aSemiconductores _xTratamiento termico _vCongresos |
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| 650 |
_aSemiconductores impuros _vCongresos |
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| 700 |
_aWilson, Syd R. _eeditor |
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| 700 |
_aPowell, Ronald A. _eeditor |
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| 700 |
_aDavies, D. Eirug. _eeditor |
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| 336 |
_atexto _2rdacontent |
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| 337 |
_asin medio _2rdamedia |
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| 338 |
_avolumen _2rdacarrier |
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| 999 |
_c2628 _d2628 |
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