000 00949nam a2200253zi 4500
005 20200318115056.0
008 020418c 1999xxua f 000 0 eng d
020 _a0815514328
035 _aMX001000914817
041 _aSPA
050 4 _aTS695
_bP54 1999
100 1 _aPierson, Hugh O.,
_eautor
245 1 0 _aHandbook of chemical vapor deposition, cvd :
_bprinciples, technology, and applications /
_cBy Hugh O. Pierson
250 _a2nd ed.
264 1 _aNorwich, New York :
_bNoyes :
_bW. Andrew,
_cc1999
300 _axxiv, 482 páginas :
_bilustraciones
490 0 _aMaterials science and process technology series. electronic materials and process technology
500 _aEdicion revisada de: Handbook of chemical vapor deposition (CVD), c1992
650 4 _aGalvanoplastia al vapor
_vManuales
336 _atexto
_2rdacontent
337 _asin medio
_2rdamedia
338 _avolumen
_2rdacarrier
999 _c3661
_d3661